化学气相沉积法制备ZnS块材料的相结构.pdfVIP

材料工程990202 材料工程 JOURNAL OF MATERIALS ENGINEERING 1999年 第2期 No.2 1999 化学气相沉积法制备ZnS块材料的相结构 憨勇　吴慧卓 ［摘要］　用化学气相沉积法制备了红外晶体ZnS块材料；分别用XRD和TEM分析了 所沉积ZnS的相结构，并用IR测试了其红外透过率。结果表明：在沉积温度为550～ 700℃，HS/Zn摩尔流量比为0.5～20的条件下所沉积ZnS的相结构主要为闪锌矿结构； 2 随着沉积温度的升高和H S/Zn摩尔流量比的增大，ZnS中有纤锌矿结构出现且其含量 2 增多，导致了ZnS红外透过率的降低。 关键词　化学气相沉积　ZnS块材料　相结构 The Phase Structure of ZnS Bulk Materials Prepared by Chemical Vapor Deposition Han Yong　Wu Huizhuo　 (Xian Jiaotong University) ［Abstract ］　The infrared crystal ZnS bulk materials were prepared by chemical vapor deposition. The phase structure of ZnS was respectively analyzed with XRD and TEM, and their infrared transmittance was measured using IR. The results are as follows. The phase structure of ZnS deposited at temperature range from 550℃to 700 ℃ and H2S/Zn mole flow ratio 0.5～20 is mainly sphalerite, and there exited a few wurtzite structure with layer morphology in ZnS. The content of wurtzite structure tends to increase with increasing deposition temperature and H2S/Zn mole flow ratio, which decreases infrared transmittance of ZnS. The formation of wurtzite structure is related to partial pressure of sulphur in deposition atmosphere. Therefore, ZnS bulk materials should be deposited at lower temperature and H2S/Zn mole flow ratio to obtain unitary sphalerite structure. Keywords　chemical vapor deposition　ZnS bulk materials　phase 1　引言 　　ZnS由于在3～5μm和8～12μm具有较高的红外透过率及优良的光、机、热学性 能，是优良的飞行器及激光器窗口材料。过去，ZnS块材料的制备常使用热压法。因用 file:///E|/qk/clgc/clgc99/clgc9902/990202.htm（第 1／6 页）2010-3-22 16:17:07 材料工程990202