2011 AMC Workshop-SEM-FIB-PPT.pdfVIP

Artwork by R. Haasch Scanning Electron Microscopy (SEM) and  Scanning Electron Microscopy (SEM) and  Focused Ion Beams (FIB) in Materials Research Focused Ion Beams (FIB) in Materials Research Jim Mabon, Vania Petrova, Mike Marshall and Wacek Swiech Frederick Seitz Materials Research Laboratory University of Illinois at Urbana‐Champaign Supported by the U.S. Department of Energy and University of Illinois © 2011 University of Illinois Board of Trustees. All rights reserved. 2 Comparison to Optical Microscopy Optical Optical SEM (secondary electrons) SEM (secondary electrons) The higher resolution and depth of focus available with the SEM are clearly observed, The SEM also provides a very wide, easily adjustable range of magnifications. For most imaging applications minimal or no sample preparation is required. The high resolution attainable (very small probe size) is due to very low mass and short wavelength of energetic electrons (0.007nm @30kV). The combination of high brightness sources of electrons and electron optics allow the formation and manipulation of very fine focused electron beams to probe the sample surface for imaging and analysis.