EHS-PPT-1(Air+Products)_对硅烷引起的相关事故以及其不同释放类型.pdfVIP

An Overview of Silane Incidents and Release Behavior 对硅烷引起的相关事故以及其不同释放类型 的回顾 March 21, 2007 Eugene Y. Ngai Dir. Of ER Disposal Technology 2007 Semicon China, Shanghai March 2007, E. Ngai Eugene Y. Ngai Mr. Eugene Ngai is the Director of ER Disposal Technology for Products and Chemicals. Eugene has a BS in Chemical Engineering and an MS in Environmental Engineering, all from New Jersey Institute of Technology. He has over 30 years of Specialty Gas Experience in Production, Laboratory, RD, Engineering, Safety positions at Matheson, Exxon Research, Solkatronic Chemicals and Scientific Gas Products. Had increasing management responsibilities during his career and held an Executive Management position as Vice President of Corporate Development and Technology for Solkatronic Chemicals for 10 years prior to the Air Products acquisition in 1999. He had responsibility for EHS, Engineering, Information Technology, Research and Development, and Quality. Most recently he was Director of Compound Semiconductor Technology in the Electronics Division and is now Director of ER and Disposal Technology in the Product Safety Group. He is active in a number of industry associations, Compressed Gas Association (CGA), Asia Industrial Gas Association (AIGA), National Fire Protection Association (NFPA) and the Semiconductor Environmental Health and Safety Association (SESHA) He also developed and manages the Emergency Response Equipment and Training group since 1990. He is the Course Director for a 3 day Specialty Gas Emergency Response course, which has trained over 4000 customers, government agencies and employees since 1990. He has tr