原创力文档- 1、原创力文档（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
- 2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击 这里二次下载。
- 3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
- 4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
- 5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
- 6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
- 7、VIP文档为合作方或网友上传，每下载1次， 网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档
查看更多
半导体制备技术简介CH01,半导体制备,半导体材料的制备方法,半导体制备工艺,半导体技术天地,半导体技术,半导体制造技术,半导体技术论坛,矽力杰半导体技术,半导体照明技术
Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm Introduction to Semiconductor Manufacturing Technology Chapter 1, Introduction Topics Introduction IC Device and Design Semiconductor Manufacturing Processes Future Trends Introduction First Transistor, ATT Bell Labs, 1947 First Single Crystal Germanium, 1952 First Single Crystal Silicon, 1954 First IC device, TI, 1958 First IC product, Fairchild Camera, 1961 First Transistor, Bell Lab, 1947 First Transistor and Its Inventors First IC Device Made by Jack Kilby of Texas Instrument in 1958 First Silicon IC Chip Made by Robert Noyce of Fairchild Camera in 1961 Moore’s Law Moore’s Law, Intel’s Version IC Scales Road Map Semiconductor Industry Feature Size and Wafer Size Smallest Known Transistor Made by NEC in 1997 Limit of the IC Geometry Limit of the IC device Atom size: several ? Need some atoms to form a device Likely the final limit is around 100 ? or 0.01 micron. About 30 silicon atoms IC Design: First IC IC Design: CMOS Inverter A Mask and a Reticle Wafer Process Flow 材料科學與工程學系 義守大學 – 助理教授 劉文仁 Photo courtesy: ATT Archive John Bardeen, William Shockley and Walter Brattain Photo courtesy: Lucent Technologies Inc. Photo courtesy: Texas Instruments Photo courtesy: Fairchild Semiconductor International Intel co-founder Gorden Moore notice in 1964 Number of transistors doubled every 12 months while price unchanged Slowed down in the 1980s to every 18 months Amazingly still correct, likely to keep until 2010. Transistors 10K 100K 1M 10M 1975 1980 1985 1990 1995 4040 8080 8086 80286 80386 80486 Pentium Pentium III 1K 2000 Integration level Abbreviation Number of devices on a chip Small Scale Integration SSI 2 to 50 Medium Scale Integration MSI 50 to 5,000 Large Scale Integration LSI 5,000 to 100,000 Very Large Scale Integration VLSI 100,000 to 10,000,000 Ultra Large Scale Integration ULSI 10,000,000 to 1,000,000,000 Super Large Scale Integration SLSI over 1,000,000,000 1995 1997 1999 2001 2
文档评论（0）