Recent advances in AFM tip-based nanomechanical machining》.pdf

International Journal of Machine Tools Manufacture 99 (2015) 1–18 Contents lists available at ScienceDirect International Journal of Machine Tools Manufacture journal homepage: /locate/ijmactool Recent advances in AFM tip-based nanomechanical machining Yongda Yan a,b,n, Yanquan Geng a,b, Zhenjiang Hu b a Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR China b Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR China a r t i c l e i n f o a b s t r a c t Article history: As one of the tip-based nanomanufacturing (TBN) approaches, the atomic force microscope tip-based Received 7 May 2015 nanomechanical technique has already been used to successfully fabricate nanodots, nanolines and two- Received in revised form dimensional or three-dimensional nanostructures on flat or even curved surfaces. This technique exhibits 1 September 2015 the unique properties of low-cost with simple, highly accurate and flexible control. First, the advances in Accepted 1 September 2015 these areas are reviewed along with the applications of these structures. Second, chemical and thermal Available online 3 September 2015 energies are also integrated with the mechanical effects, resulting in some new nanomanufacturing Keywords: