《Zr1-xSixN纳米涂层的制备及其力学性能 PREPARATION AND MECHANICAL PROPERTIES OF Zr1-xSixN NANO-COATINGS》.pdfVIP

第38卷第10期 硅酸盐学报 V01．38，No．10 2010年10月 JoUIⅢALOFT既CH小『ESECERAⅦCSOCrETY October，2010 Zrl可SixN纳米涂层的制备及其力学性能 黄若轩2，孙鹏1，朱芳萍It祁正兵1，王周成1 (1．厦门大学化学化工学院；2．厦门大学材料学院，福建厦门361005) 构，随着zrl。s0N涂层中si含量的增加，涂层截面的形貌由柱状晶转变为非柱状等轴晶，其结构的变化为：固溶体一nc-酬，叶Si抖4结构一非晶结构。 耐磨损性能随si含量的增加而增强。 关键词：氮化硅锆涂层；硬度；摩擦因数；磨损性能 中圈分类号：TGl74．4“文献标志码：A 文章编号：0454--5648(2010)10-1886--05 PREPARATIONANDMECHANICALPROPERTIESOF NANO-COATINGS Zrl_。SixN of andChemical of Materials，XiamenUniversity，Xiamen (1．CollegeChemistry Engineering；2．College silicon． Were directcurrentandradio fTomzirconiumand Abstract：Zrl一§irNnano．coatingsdcpositedby frequencyCO—sputtering 1kSicontentsinthe werevaried the tOtheSi influencesofSicontenton Zrl吖SkNcoating power target．The bychanging applied the and of were the sizes，hardnesstribologicalpropertiesZq—*Si,Ncoatingsinvestigated，and phasestructure，composition,crystal of the and mechanismofthe was resultsshowthattheadditionSi affectsorientation hardening coatingsexplored．The significantly structureof Sicontent cross-sectionofthe fromcolumn phase Zrl{SkNcoatings．Whenincreased,the morphologycoatingchanges to thento structuretonon-columnstructure．themicrostructurefromsolidsolu