静电悬浮位置控制系统设计与实现.pdfVIP

0254-6124/2011/31(5)-675–07 Chin. J. Space Sci. Zhou Yangyang, Wei Ren, Wang Chao, Sun Zhibin, Cai Shijie, Zhai Guangjie. Design and implementation of electrostatic levitation position control system. Chin. J. Space Sci., 2011, 31(5): 675-681 ∗ 1,2 1,2 1 1 1 1 1( Æ 100190) 2( Æ 100049) Æ. , , , (PSD) . PSD PID , PID , . PID , Æ. , PSD, MCU, V 524, TP 273 Design and Implementation of Electrostatic Levitation Position Control System ZHOU Yangyang1,2 WEI Ren1,2 WANG Chao1 SUN Zhibin1 CAI Shijie1 ZHAI Guangjie1 1(Center for Space Science and Applied Research, Chinese Academy of Sciences, Beijing 100190) 2( Graduate University of Chinese Academy of Sciences, Beijing 100049) Abstract Electrostatic levitation position control system is the core technology of electrostatic levitation material processing apparatus. In order to solve this problem, the basic conditions of stable levitation are analyzed. Three-dimensional position of the sample is measured by using two orthogonal parallel light beams with different wavelengths as light sources, and Position Sensitive Detectors (PSD) as position signal receiver. The Proportion Integration Differentiation (PID) posi- tion feedback control system is set up by using position signal as input and analog voltage as output. The output of the PID feedback control system drives the voltage amplifier to control the strength of the electric field according to position change of the sample. By