半导体工艺基础第五章刻蚀解析.pptVIP

第五章 Etch 刻 蚀 西南科技大学理学院 2013.03.15 Etch 刻蚀内容 熟悉刻蚀术语 比较：干法刻蚀、湿法刻蚀 IC工艺中四种被刻蚀的材料和主要的刻蚀剂 IC工艺的刻蚀过程 注意刻蚀工艺中的危险 Definition of Etch Process that removes material from surface Chemical, physical or combination of the two Selective or blanket etch Selective etch transfers IC design image on the photoresist to the surface layer on wafer Other applications: Mask making, Printed electronic board, Artwork, etc. 栅掩膜对准 Gate Mask Alignment 栅掩膜曝光 Gate Mask Exposure Development/Hard Bake/Inspection Etch Polysilicon刻蚀多晶硅 Etch Polysilicon 继续 Strip Photoresist 剥去光刻胶 Ion Implantation Rapid Thermal Annealing 刻蚀术