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Outline Introduction: What is a MEMS Gyroscope? Purpose Mechanical Structure: Design and Optimization Electrical Structure: Theoretical Calculations Design Results Manufacturing Process Testing Equipment: PCB Conclusion Designing the Sense Electrodes Design Results Conclusion MEMS Tuning-Fork Gyroscope Group 8: Amanda Bristow Travis Barton Stephen Nary What is a MEMS Gyroscope? A small, silicon device that senses rotation Benefits: Small size Low power Cheap to mass produce Common Applications: iPhone 4 Wii Motion Plus MEMS Gyroscope viewed under a microscope Purpose To assist Dr. Hao’s research by refining an existing MEMS Gyroscope design to improve accuracy To examine the method of fabrication for MEMS devices To gain practical experience with the testing of MEMS devices using the existing design Structure of a MEMS Gyroscope Drive electrode Sense electrodes Anchors Proof mass Proof mass Drive electrode Symmetric mechanical structure Gyroscope structure free to move, except at anchors Comb Drive Transducers used to drive proof masses Sense electrodes used to detect rotation Gyroscope Structure Drive Mode Structure made to vibrate at natural frequency Vibration of proof mass provides necessary velocity for Coriolis Acceleration Drive Mode Vibration Sense Mode When rotation is applied, Coriolis force causes proof mass direction to change Coriolis Acceleration Sense Mode Vibration Optimization of Mechanical Structure Ideal frequency range: 15 kHZ – 30 kHz Ideal difference between drive mode and sense mode: 50 Hz – 100 Hz Key Dimensions for adjusting frequency: L2 → Sense Mode L1 → Drive Mode L2 L1 Key Dimensions Optimization of Mechanical Structure Trial L1, μm Drive L2, μm Sense Difference 5 520 14924.587 620 15904.967 980.381 13 494 15872.906 620 15951.401 78.495 Comb Drive Transducers Drive electrode Anchors Proof mass Proof mass Drive electrode Form capacitors with proof masses Use “fingers” to increase surface area AC voltage applied to one tran