光栅计量型的垂直扫描位移工作台及其误差分析.pdfVIP

第27替第3A期 2侧年9 月 计量学报 A口A MEIRO川GICA SINICA Vol. 27 , No 3A September，双脚 光栅计量型的垂直扫描位移工作台及其误差分析 常索萍1 ， 孙艳玲l ，2 ， 谢铁邦 l ， 戴 蓉1 (1.华中科技大学机械科学与工程学院，湖北武仅 43仰74;2. 湖北襄樊学院机械工程系，湖北襄樊 441053) 摘骤:为满足精密测壤中毒?扫摘自光干涉以及千分表、电感位移传感器、表面粗糙度触针位移传感器标定对 1蓝蓝方向的高精度定役和商分辨率运动要求，研制出→种纳米级垂直扫描位移工作台。该工作台采用荣性饺链结 构，压电陶瓷驱动性移，满足纳米级微位移驱动要求，问时利用两级杠杆放大结构，扩大了位移行程。针对压电陶 黯驱动的位移随电压变化的非钱性特点，利用衍射光栅对压电驱动进行实时监控，对这种非钱性误差进行实时补 偿。衍射光栅剧定在工作台的微定位板上，工作台的移动量可由街射光栅二次衍射干涉后产生的条纹变化得到。 根据衍射光栅的计量特点，分析垂直扫描位移工作台测最误兹的主主要影响因素。通过试验验证，优化系统误差，进 …步提高了蠢宽扫描位移工作台的定位精度。 关键询:计量学;强K扫描位移台;压电陶辑:衍射光栅:白光干涉 中图分提号: TB921 文献标识码:A 文章编号: 1000- 1158(2伽)3A耐15耐 Error Analysis of Vertical Scanning Displacement Stage with Grating Sensor CHANG Su-ping 1 ? SUN Yan翩ling1 ， 2 ， XIE Tie-bang1 , DAI Ro时 (1. De阳rtment of Mech咀uùcal Engìneering , Huazho吨 UIùversìty of Scìence and T，创hnology ， Wuhan , H由ei 43ω74 ， Chlna; 2. Department of M，创haIùcal Engìneerin毡， School of Xìangfan , Xìangfan, Hubeì 441053 , Chlna) Abstract: In order to meet the requirements of hlgh-precìsion location and hlgh-~棚lution movement ìn ve削cal SCanIùng whlte-light interferometry and the calibration of !Iùcrometer , electroIùc 恤nsducer ， 1ylus 阴阳or for roughness measurement , a nanome悦r vertical sc则叫 displacement stage is develo闷. A mecharùsm of flexural-hinge guided motíon mic仲displacement is utilized and driven by pje毗lec创C 恤nsducer in thl吕西tage and has twc咿ade m咽必ìcation ， 80 the stag巳 has both large measure刷 刷nt range and high-precì吕ion and high明白。Ilution. Because of the hyste阳is and nonlinear motion of四r， the whole displacement process is monitored by a 胆创ng sensor and 由ìs nonlinear error is compensated in 11明l-time. A holo萨am diffractive 伊ating is 缸.00 to the mic卧po刨出ner of the stage and moves wìth the 搁在e ， 50 the displacement of the stage c栩如 get by detecting the fringe ch叫e. Aωol1ding to the meωurement characteristic of the holo阴m 础r圳阴阳t吨， the maìn influent factors of me翩翩ment error for vertical SCanIùng dis抖acement are analyzed. Some exp咄nen怡 are cru吼叫 out to prove