激光聚焦线扫描法测量KDP晶体坯片的体缺陷.pdfVIP

第 24 卷第 12 期 2016 年 12 月 文章编号 1004-924XC 2016) 12-3020-07 光学精密工程 Optics and Precision Engineering Vo l. 24 No.12 Dec.2016 激光聚焦线扫描法测量 KDP 晶体坯片的体缺陷 倪开灶1 ，刘世杰l\吴周令2 ，陈 坚2 (1.中国科学院上海光学精密机械研究所强激光材料重点实验室，上海 201800; 2. 合肥知常光电科技有限公司，安徽合肥 230000) 摘要:为了快速准确测量磷酸二氢饵 CKDP)晶体坯片的体缺陷，提出了高速激光聚焦线扫描散射成像方法，并建立了相 应的测量系统。研究了该系统的测量原理和图像采集、图像处理和体缺陷信息提取方法。基于激光散射技术，结合高速 运动装置对晶体坯片内部进行三维扫描，用线阵 CCD探测器接收气泡、包裹物等体缺陷产生的散射光。然后利用折射 率匹配液消除粗糙表面带来的不利影响。最后结合数字图像处理技术，对采集的图像进行实时处理。通过去除背景后 与设定阕值比较得到具有体缺陷特征的图像，再对其进行二值化处理，提取得到体缺陷的位置和尺寸信息。利用该检测 装置对 KDP 品体坯片体缺陷进行了测量，结果显示其检测分辨率优于 40μm，能够为晶体坯片的精确切割和最大程度 的利用提供依据，从而节省了大量成本。 关 键 词:磷酸二氢匆CKDP) 晶体;晶体坯片 z体缺陷;激光聚焦线扫描;散射测量 中图分类号 :077;TN247 文献标识码 :A doi:lO. 3788/0PE. 3020 Measurement of bulk defects for KDP crystal billet with focused line scanning NI Kai-zao 1 , LIU Shi-jie1 善 ， WU Zhou-ling2 , CHEN Jian2 (1. Key Laboratory of Materials for High Power Laser , Shanghai Institute of 。ρtics and Fine 儿1echanics ， Chinese Academy of Sciences , Shanghai 201800 , China; 2. ZCOptoelectronic Technologies. Co. , Ltd. , Hefei 230000 , China) 祷 Corresρonding author .E-mail: shijieliu@siom.ac.cn Abstract: To detect the bulk defects in crystal billet of a KDP(potassium dihydrogen phosphate)crys- tal quickly and exactly , a laser focusing scanning scattering imaging method was proposed and a corre- sponding high speed line scanning measurement setup was constructed. The principle of detection , im- age acquisition , image processing and the extraction of bulk defects were investigated. Based on laser scattering technique , a focused line laser beam was used to scan all parts of the crystal billet with a high-speed movement device. The scattering light caused by bulk defects such as bubbles and inclu sions was collected by a linear array CCD. The adverse effect caused by rough surface was eliminated with the index-matching fluid. Combined with digital image processing technique. the captured image was processed in real time. An averaged background was subtract