Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing 英文参考文献.docVIP

Sensors 2012, 12, 2436-2455; doi:10.3390/s120302436 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing Vittorio M. N. Passaro * and Mario La Notte Photonics Research Group, Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Via Edoardo Orabona 4, 70125 Bari, Italy; E-Mail: lanottemario@alice.it * Author to whom correspondence should be addressed; E-Mail: passaro@deemail.poliba.it; Tel.: +39-080-596-3850; Fax: +39-080-596-3410. Received: 18 January 2012; in revised form: 9 February 2012 / Accepted: 20 February 2012 / Published: 23 February 2012 Abstract: Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%. Keywords: slot waveguides; homogeneous optical sensing; slot couplers Classification PACS: 07.07.Df Sensors; 42.79.Gn Optical waveguides and couplers 1. Introduction Nowadays, rapid advancements in photonic technologies