硅纳米孔柱阵列湿敏性能研究.pdfVIP

第24卷 第5期 传 感 技 术 学 报 Vo1．24 No．5 2011年 5月 CHINESEJOURNALOFSENSORSAND ACTUATORS Mav2011 Humidity．SensingPropertiesofNanostructuredSiC／SiliconNanoporousPillarArray WANGHaiyan ，CHENHongyan，HUQinffei，MENGXiaobo，ttANChangbao，LIXinjian ，1．DepartmentofPhysicsandLaboratoryofMaterialsPhysics，ZhengzhouUniversity，Zhengzhou450052，China．1 2．DepartmentofTechnologicalPhysics，ZhengzhouUniversityofLightIndustry，Zhengzhou450002，China ， Abstract：Utilizingsiliconnanoporouspillararray(Si—NPA)assubstrates，twonanocompositesystems，SiC nanoparticle／Si-NPA(nc-SiC／Si—NPA)andSiCnanowire／Si—NPA(nW—SiC／Si-NPA)werepreparedbyachemical vapordepositionmethod．Thesilrfacemorphologies，chemicalcompositionsand room—temperaturehumidity—sensing propertiesofthetwosystemswerecharacterized．Itwasdisclosedthatthecapacitanceresponseofboth，一SiC／Si— NPAandrtW—SiC／Si—NPAwerehighlysensitivetovapor．Withtherelativehumidity(RH)changingfrom 11％ to 95％ andatatestingfrequencyof100Hz．acapacitanceincrementof750％ fornc-SiC／Si-NPA and1050％ ofr几 一 SiC／Si-NPA wasachieved，andthecorrespondingresponse／recoverytimesweredeterminedtobe100／150Sand10／ 10S，respectively．Thehigh humidity—sensitivityofthetwosystemswasattributed totheenlargementofthesensing areascausedbythepresentationoflargequantitiesofhe-SiC andnw-SiC，whiletheshortresponse~recoverytimes wereduetotheformationofeffectivevaportransportationpathsprovidedbythearraystructureofSi-NPA． Keywords：humiditysensor；SiC／siliconnanoporouspillararray；chemicalvapordeposition EEACC：7230L doi：10．3969／j．issn．1004-1699．2011．05．003 纳米碳化硅／硅纳米孑L柱阵列湿敏性能研究术 王海燕 ，陈红彦 ，胡青飞 ，孟晓波 ，韩昌报 ，李新建 ，1．郑州大学物理工程学院，材料物理实验室，郑州 450052；＼ ＼2．郑州轻工业学院技术物理系，郑州450002 ／ 摘 要 ：以硅纳米孔阵列(Si—NPA)为衬底，采用化学气相沉积法分别制备了SiC纳米颗粒／si—NPA(—SiC／Si—NPA)和SiC 纳米线／Si-NPA(nW—SiC／Si-NPA)复合体系，并对其