Toward 100 Mega-Frames per Second Design of an Ultimate Ultra-High-Speed Image Sensor 英文参考文献.docVIP

Sensors 2010, 10, 16-35; doi:10.3390/s100100016 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Toward 100 Mega-Frames per Second: Design of an Ultimate Ultra-High-Speed Image Sensor Dao Vu Truong Son 1,*, Takeharu Goji Etoh 1, Masatoshi Tanaka 1, Nguyen Hoang Dung 1, Vo Le Cuong 1, Kohsei Takehara 1, Toshiro Akino 2, Kenji Nishi 3, Hitoshi Aoki 4 and Junichi Nakai 4 1 Graduate School of Science and Engineering, Kinki University, Higashi-Osaka, Osaka 577-8502, Japan; E-Mails: best2010@civileng.kindai.ac.jp (T.G.E.); mtanaka@civileng.kindai.ac.jp (M.T.); hdnguyen@civileng.kindai.ac.jp (N.H.D.); vlcuong@civileng.kindai.ac.jp (V.L.C.); takehara@civileng.kindai.ac.jp (K.T.) 2 School of Biology-Oriented Science and Technology, Kinki University, Wakayama 649-6493, Japan; E-Mail: akino@info.waka.kindai.ac.jp 3 Kinki University Technical College, Kumano, Mie 519-4935, Japan; E-Mail: nishi@ktc.ac.jp 4 Sharp Corporation, Fukuyama, Hiroshima 721-8522, Japan; E-Mails: aoki.hitoshi@sharp.co.jp (H.O.); nakai.junichi@sharp.co.jp (J.N.) * Author to whom correspondence should be addressed; E-Mail: vtsdao@civileng.kindai.ac.jp; Tel.: +81-72-928-3120. Received: 3 November 2009; in revised form: 3 December 2009 / Accepted: 8 December 2009 / Published: 24 December 2009 Abstract: Our experience in the design of an ultra-high speed image sensor targeting the theoretical maximum frame rate is summarized. The imager is the backside illuminated in situ storage image sensor (BSI ISIS). It is confirmed that the critical factor limiting the highest frame rate is the signal electron transit time from the generation layer at the back side of each pixel to the input gate to the in situ storage area on the front side. The theoretical maximum frame rate is estimated at 100 Mega-frames per second (Mfps) by transient simulation study. The sensor has a spatial resolution of 140,800 pixels with 126 linear storage