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Fabrication and Characterization of PolyanilinePVA Humidity Microsensors
Sensors 2011, 11, 8143-8151; doi:10.3390/s110808143
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Fabrication and Characterization of Polyaniline/PVA Humidity
Microsensors
Ming-Zhi Yang, Ching-Liang Dai * and Wei-Yi Lin
Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan;
E-Mails: d099061005@.tw (M.-Z.Y.); g9861019@.tw (W.-Y.L.)
* Author to whom correspondence should be addressed; E-Mail: cldai@.tw;
Tel.: +886-4-2284-0433; Fax: +886-4-2287-7170.
Received: 27 June 2011; in revised form: 27 July 2011 / Accepted: 18 August 2011 /
Published: 19 August 2011
Abstract: This study presents the fabrication and characterization of a humidity microsensor
that consists of interdigitated electrodes and a sensitive film. The area of the humidity
microsensor is about 2 mm2. The sensitive film is polyaniline doping polyvinyl alcohol
(PVA) that is prepared by the sol-gel method, and the film has nanofiber and porous
structures that help increase the sensing reaction. The commercial 0.35μm Complimentary
Metal Oxide Semiconductor (CMOS) process is used to fabricate the humidity
microsensor. The sensor needs a post-CMOS process to etch the sacrificial layer and to
coat the sensitive film on the interdigitated electrodes. The sensor produces a change in
resistance as the polyaniline/PVA film absorbs or desorbs vapor. Experimental results
show that the sensitivity of the humidity sensor is about 12.6 kΩ/%RH at 25°C.
Keywords: humidity microsensors; polyaniline; polyvinyl alcohol; MEMS
1. Introduction
Humidity sensors are important devices that can be used to measure and monitor environmental
humidity. Recently, various microsensors have been manufactured using microelectromechanical
system (MEMS) technology [1-4]. Humidity sensors fabricated by this technology have the benefits of
small size, low cost, high performance and easy mass
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