Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS).docVIP

Sensors 2009, 9, 1382-1393; doi:10.3390/OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS) Bian Tian *, Yulong Zhao, Zhuangde Jiang , Ling Zhang, Nansheng Liao, Yuanhao Liu and Chao Meng State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xian Jiaotong University, Xian 710049, P.R. China * Author to whom correspondence should be addressed; E-Mail: tian.bian12@; Received: 22 January 2009; in revised form: 17 February 2009 / Accepted: 22 February 2009 / Published: 27 February 2009 Abstract: In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long- term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy. Keywords: Piezoresistive; TPMS; Pressure sensor; FEM. 1. Introduction Nowadays, there is growing interest in Tire Pressure Measurement Systems (TPMS), which has led to the development of sundry pressure sensors. Despite the abundant evidence that tires are definitely one of the most vital safety components on a vehicle, but a tire can lose up to half of its air pressure without appearing to be underin