Fabrication of a Flexible Micro CO Sensor for Micro Reformer Applications.docVIP

Sensors 2010, 10, 10701-10713; doi:10.3390/s101210701 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Fabrication of a Flexible Micro CO Sensor for Micro Reformer Applications Chi-Yuan Lee *, Chi-Chung Chang and Yi-Man Lo Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan; E-Mails: s975055@.tw (C.-C.C.); s995048@.tw (Y.-M.L.) * Author to whom correspondence should be addressed; E-Mail: cylee@.tw; Tel.: +886-3-4638800 ext. 2478; Fax: +886-3-4558013. Received: 25 October 2010; in revised form: 22 November 2010 / Accepted: 29 November 2010 / Published: 30 November 2010 Abstract: Integration of a reformer and a proton exchange membrane fuel cell (PEMFC) is problematic due to the presence in the gas from the reforming process of a slight amount of carbon monoxide. Carbon monoxide poisons the catalyst of the proton exchange membrane fuel cell subsequently degrading the fuel cell performance, and necessitating the sublimation of the reaction gas before supplying to fuel cells. Based on the use of micro-electro-mechanical systems (MEMS) technology to manufacture flexible micro CO sensors, this study elucidates the relation between a micro CO sensor and different SnO2 thin film thicknesses. Experimental results indicate that the sensitivity increases at temperatures ranging from 100–300 °C. Additionally, the best sensitivity is obtained at a specific temperature. For instance, the best sensitivity of SnO2 thin film thickness of 100 nm at 300 °C is 59.3%. Moreover, a flexible micro CO sensor is embedded into a micro reformer to determine the CO concentration in each part of a micro reformer in the future, demonstrating the inner reaction of a micro reformer in depth and immediate detection. Keywords: MEMS; flexible micro CO sensor; micro reformer 1. Introduction Integration of a reformer and a proton exchange membrane fuel ce