液相プロセスによるシリコン膜の形成とトランジスタの作製.PDFVIP

Solution-Processed Silicon Films and Transistors Yasuo Matsuki Haruo Iwasawa Daohai Wang Yoshitaka Koshikiya Tatsuya Shimoda The use of solution processes as opposed to conventional vacuum processes and vapour-phase deposition for the fabrication of electronic devices has received considerable attention for a wide range of applications, with a view to reducing processing costs. In particular, the ability to print semiconductor de- vices using liquid-phase materials could prove essential for some envisaged applications, such as large-area flexible displays. Recent research in this area has largely been focused on organic semiconductors, some of which have mobilities comparable to that of amorphous silicona-Sibut issues of reliability remain. Solu- tion processing of metal chalcogenide semiconductors to fabricate stable and high-performance transistors has also been reported. This class of materials is being explored as a possible substitute for silicon, given the complex and expensive manufacturing processes required to fabricate devices from the latter. However, if high-quality silicon films could be prepared by a solution process, this situation might change drastically. Here we demonstrate the solution processing of silicon thin-film transistorsTFTsusing a silane-based liquid precursor. Using this precursor, we have prepared polycrystalline siliconpoly-Sifilms by both spin- coating and ink-jet printing, from which we fabricate TFTs with mobilities of cm V s andcm V s respectively. Although the processing conditions have yet to be optimized, these mobilities are already greater than those that have been achieved in solution-processed organic TFTs, and they exceed those of a a-Si TFTscm V s .