TiO2NSiO2复合薄膜的制备与性能研究.pdfVIP

摘 要 本文采用溶胶-凝胶法并结合旋涂法在普通玻璃片上制备了 SiO2 增透膜、TiO2 薄 膜及掺杂 TiO 薄膜、TiO :N/SiO 复合薄膜，采用X 射线衍射仪 （XRD ）、扫描电子 2 2 2 显微镜 （SEM ）、傅里叶变换红外光谱仪 （FTIR ）、分光光度计、X 射线光电子能谱 仪 （XPS ）等技术对薄膜的结构进行了表征，用紫外-可见-近红外光谱仪 （UV-Vis- NIR ）和自制的测试装置考察了样品的光学性能与催化性能。结果表明：采用氨水作 催化剂制备的 SiO 薄膜的透过率高于以盐酸作催化剂制备的薄膜，在最佳实验条件下 2 制备的 SiO 薄膜具有较好的增透作用；TiO :N 薄膜对光线的吸收波长发生了红移， 2 2 在可见光波段吸收增强；TiO :N/SiO 复合薄膜表面均匀平整，局部有小凸起，光催化 2 2 降解有机物的效率高于TiO :N 薄膜。 2 关键词：溶胶凝胶法 SiO 膜 TiO :N 膜 复合薄膜 光催化 2 2 I ABSTRACT In the dissertation, SiO antireflective films, TiO thin films and TiO :N/SiO composite 2 2 2 2 films were coated onto glass substrates by sol-gel method. The film samples were characterized by XRD, SEM, FTIR, Spectrophotometer, X-ray photoelectron spectrometer. The optical and photocatalytic properties were tested by UV-Vis-NIR spectrometer and self- made device respectively. The result showed that the transmittance of SiO2 film is higher when using ammonia as catalyst. On the optimum conditions, the transmittance of coated substrates exhibited better performance. The absorbance of N-doped TiO2 films exhibited a redshift phenomenon and absorption at visible area was increased. The surface of TiO :N/SiO composite films was flat with a few protuberance. Its photocatalytic efficiency 2 2 was higher than N-doped TiO2 films. Key words: Sol-gel SiO antireflective film TiO :N fil