characterizing vibrating cantilevers for liquid viscosity and density sensing描述振动悬臂液体粘度和密度感应.pdfVIP

Hindawi Publishing Corporation Journal of Sensors Volume 2008, Article ID 697062, 9 pages doi:10.1155/2008/697062 Research Article Characterizing Vibrating Cantilevers for Liquid Viscosity and Density Sensing Christian Riesch,1 Erwin K. Reichel,2 Franz Keplinger,1 and Bernhard Jakoby2 1 Institute of Sensor and Actuator Systems, Vienna University of Technology, Gusshausstrasse 27-29/366, 1040 Vienna, Austria 2 Institute for Microelectronics and Microsensors, Johannes Kepler University, Altenberger Strasse 69, 4040 Linz, Austria Correspondence should be addressed to Christian Riesch, christian.riesch@tuwien.ac.at Received 30 May 2008; Accepted 14 August 2008 Recommended by Maria Tenje Miniaturized liquid sensors are essential devices in online process or condition monitoring. In case of viscosity and density sensing, microacoustic sensors such as quartz crystal resonators or SAW devices have proved particularly useful. However, these devices basically measure a thin-film viscosity, which is often not comparable to the macroscopic parameters probed by conventional viscometers. Miniaturized cantilever-based devices are interesting alternatives for such applications, but here the interaction between the liquid and the oscillating beam is more involved. In our contribution, we describe a measurement setup, which allows the investigation of this interaction for different beam cross-sections. We present an analytical model based on an approximation of the immersed cantilever as an oscillating sphere comprising the effective mass and the intrinsic damping of the cantilever and additional mass and damping due to the liquid loading. The model parameters are obtained from measurements with well-known sample liquids by a curve fitting procedure. Finally, we present the measurement of v