串列加速器-离子注入机-透射电镜联机系统的建立.pdfVIP

第41卷第6期 原子能科学技术 Vo l. 41 ,No. 6 Atomic Energy Science and Technology Nov. 2007 2007年11月 串列加速器-离子注入机-透射电镜 联机系统的建立 郭立平，刘传胜，黎 明，宋 掉，叶明生，付德君，范湘军 〈武汉大学物理学院加速器实验室，湖北武汉 (30072) 摘要:建立了由 2X 1. 7 MV 串列加速器、200 kV 离子注入机、H800 型透射电子显微镜和联机传输系统 组成的我国第 1 套串列加速器-离子注入机-透射电子显微镜联机装置。对主要设备进行了改造，并采取 有效措施解决了联机装置的隔震问题。 2 台加速器和所有的真空泵都运行时，电镜仍可正常工作.观察 到的图像质量不受振动影响。电镜室内样品倾斜角最大可达 52。以上，离子注入不影响电镜观测，可进 行离子注入的原位和实时结构研究.离子注入机输出的 115 keV 氮离子在电镜入口测得的束流强度达 100-180 nA. 初步实验已原位观察到氮离子注入导致单晶硅非品化的过程，显示这套装置具有离子注 人条件下的原位观测能力. 关键词:原位透射电子显微镜;加速器F 联机装置F 离子注入 文章编号:1000-6931(2007)06-0648-05 中图分类号:TL52 文献标识码:A Construction of Tandem-Implanter-TEM Interface System GUO Li-ping , LIU Chuan-sheng , LI Ming , SONG Bo , YE Ming-sheng , FU De-jun , FAN Xiang-jun (Accelerator Laboratory. School 01 Physics. Wuhan University. Wuhan 430072. China) Abstract: The first tandem-implanter-TEM interface system in China , consisting of a 2 X 1. 7 MV tandem accelerator , a 200 k V ion implanter , a H800 transmission electron microscope (TEM) and the beam transport system , was established recently. Improve- ments on the component facilities were made , and effectÍve steps were taken to minimÍze mechanical vibration transmission from the ion beam line to the TEM. No obvious wob- bling of the TEM image was observed , showing that the TEM works normally while the tandem and the implanter as well as the vacuum pumps are in operation. Under the tilting angle of up to 520 of the sample relative to the ion beam , the TEM observation was not affected by the ion implantation , meaning that in situ and real time