原创力文档silicon micromachining for high performance passive structures at w band硅微加工高性能被动结构在w波段.pdfVIP
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silicon micromachining for high performance passive structures at w band硅微加工高性能被动结构在w波段
Active and Passive Elec. Comp. , 2002, Vol. 25, pp. 113–122
SILICON MICROMACHINING FOR HIGH
PERFORMANCE PASSIVE STRUCTURES AT W BAND
a a a a b b
B. GUILLON , K. GRENIER , T. PARRA , P. PONS , D. CROS , P. BLONDY ,
J. GRAFFEUILa, J. L. CAZAUXc and R. PLANAa,*
aLAAS-CNRS 7 Av du Colonel Roche 31077 Toulouse Cedex04 France; bIRCOM 123 Av Albert
Thomas, 87000 Limoges Cedex France; cAlcatel Space Industry 26 Av J.F. Champollion 31037
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