size-dependent indirect excitation of trivalent er ions via si nanocrystals embedded in a silicon-rich silicon oxide matrix deposited by ecr-pecvd尺度依赖的间接激发er三价离子通过硅纳米晶体嵌入在一个富含硅元素的氧化硅矩阵由ecr-pecvd沉积.pdf
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size-dependent indirect excitation of trivalent er ions via si nanocrystals embedded in a silicon-rich silicon oxide matrix deposited by ecr-pecvd尺度依赖的间接激发er三价离子通过硅纳米晶体嵌入在一个富含硅元素的氧化硅矩阵由ecr-pecvd沉积
Hindawi Publishing Corporation
Journal of Nanotechnology
Volume 2009, Article ID 769142, 5 pages
doi:10.1155/2009/769142
Research Article
Size-Dependent Indirect Excitation of Trivalent Er Ions via Si
Nanocrystals Embedded in a Silicon-Rich Silicon Oxide Matrix
Deposited by ECR-PECVD
G. Zatryb,1 A. Podhorodecki,1 J. Misiewicz,1 J. Wojcik,2 and P. Mascher2
1 Institute of Physics, Wroclaw University of Technology, Wybrzeze Wyspianskiego 27, 50-370 Wroclaw, Poland
2 Centre for Emerging Device Technologies, Hamilton, ON, Canada L8S 4L7
Correspondence should be addressed to G. Zatryb, grzegorz.zatryb@pwr.wroc.pl
Received 21 July 2009; Revised 7 October 2009; Accepted 23 December 2009
Recommended by John A. Capobianco
Silicon nanocrystals (Si-nc) embedded in a silicon-rich silicon oxide matrix codoped with Er3+ ions have been fabricated by
electron-cyclotron plasma-enhanced chemical vapor deposition. Indirect excitation of erbium photoluminescence via silicon
nanocrystals has been obtained within a broad pump wavelength range. The influence of different nanocrystal sizes on the
excitation transfer from the Si-nc to Er3+ ions is discussed.
Copyright © 2009 G. Zatryb et al. This is an open access article distributed under the Creative Commons Attribution License,
which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
1. Introduction the band gap and transfers its recombination energy to Er3+
ion by Auger-like process. The second energy transfer process
Erbium codoped silicon nanocrystals have become a subject
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