DESCRIPTION OF MEASUREMENT TE （测量TE的描述）.pdfVIP

Estimation of Uncertainty in Plate Thickness Measurement By X-ray Fluorescence Spectrometry Glenn E. Staudt AMP Incorporated 2 ABSTRACT tainty such as substrate and saturation uncertainties and calibration standard thicknesses. These sources of mea- A foundation is developed for assessment of the uncer- tainty of coating layer thickness analysis using commercial surement uncertainty can be estimated by other means. x-ray fluorescence instrumentation. Proper evaluation of the measurement uncertainty is requisite for effectual ap- OBJECTIVE plication to plating process control and product disposition, but traditional methods of assessment (by repetitive mea- The objective of this work is to provide a basis for accurate surement) are inadequate due to exclusion of major evaluation of the measurement uncertainty associated with sources of experimental variability. The major sources of the determination of coating thickness using commercial measurement uncertainty are identified and their contribu- x-ray fluorescence apparatus. This will be accomplished tions to the overall uncertainty of the analytical results are through the identification of the major sources of measure- estimated. The effect of calibration uncertainty due to