a micro-machined gyroscope for rotating aircraft微机械陀螺仪旋转飞行器.pdfVIP

Sensors 2012, 12, 9823-9828; doi:10.3390/s120709823 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Communication A Micro-Machined Gyroscope for Rotating Aircraft Qingwen Yan 1,2,*, Fuxue Zhang 2 and Wei Zhang 2 1 School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China 2 Sensing Technique Research Center, Beijing Information Science and Technology University, Beijing 100101, China; E-Mails: zhangfuxue@263.net (F.Z.); way_zh@163.com (W.Z.) * Author to whom correspondence should be addressed; E-Mail: qingwenxp@; Tel.: +86-135-2096-3566; Fax: +86-10-6487-9486. Received: 1 April 2012; in revised form: 23 May 2012 / Accepted: 1 June 2012 / Published: 23 July 2012 Abstract: In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing pro