a sub-ppm acetone gas sensor for diabetes detection using 10 nm thick ultrathin inn fets糖尿病sub-ppm丙酮气体传感器检测使用10 nm厚超薄客栈场效应晶体管.pdfVIP

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a sub-ppm acetone gas sensor for diabetes detection using 10 nm thick ultrathin inn fets糖尿病sub-ppm丙酮气体传感器检测使用10 nm厚超薄客栈场效应晶体管.pdf

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a sub-ppm acetone gas sensor for diabetes detection using 10 nm thick ultrathin inn fets糖尿病sub-ppm丙酮气体传感器检测使用10 nm厚超薄客栈场效应晶体管

Sensors 2012, 12, 7157-7168; doi:10.3390/s120607157 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Sub-ppm Acetone Gas Sensor for Diabetes Detection Using 10 nm Thick Ultrathin InN FETs Kun-Wei Kao 1, Ming-Che Hsu 2, Yuh-Hwa Chang 1, Shangjr Gwo 3 and J. Andrew Yeh 1,2,* 1 Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013, Taiwan; E-Mails: s9835812@.tw (K.-W.K.); d929205@.tw (Y.-H.C.) 2 Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan; E-Mail: s9863570@.tw 3 Department of Physics, National Tsing Hua University, Hsinchu 30013, Taiwan; E-Mail: gwo@.tw * Author to whom correspondence should be addressed; E-Mail: jayeh@.tw; Tel.: +886-3-571-5131 (ext. 42912); Fax: +886-3-574-5454. Received: 16 April 2012; in revised form: 15 May 2012 / Accepted: 21 May 2012 / Published: 29 May 2012 Abstract: An indium nitride (InN) gas sensor of 10 nm in thickness has achieved detection limit of 0.4 ppm acetone. The sensor has a size of 1 mm by 2.5 mm, while its sensing area is 0.25 mm by 2 mm. Detection of such a low acetone concentration in exhaled breath could enable early diagnosis of diabetes for portable physiological applications. The ultrathin InN epilayer extensively enhances sensing sensitivity due to its strong electron accumulation on roughly 5–10 nm deep layers from the surface. Platinum as catalyst can increase output current signals by 2.5-fold (94 vs. 37.5 μA) as well as reduce response time