near-field thermometry sensor based on the thermal resonance of a microcantilever in aqueous medium近场温度测量传感器基于热微悬臂在水介质的共振.pdfVIP

Sensors 2007, 7, 3156-3165 sensors ISSN 1424-8220 © 2007 by MDPI /sensors Full Research Paper Near-Field Thermometry Sensor Based on the Thermal Resonance of a Microcantilever in Aqueous Medium Seonghwan Kim 1, Kyung Chun Kim 2 and Kenneth David Kihm 1,* 1 Department of Mechanical, Aerospace, and Biomedical Engineering, University of Tennessee, Knoxville, Tennessee, USA 37996 2 School of Mechanical Engineering, MEMS/Nano Fabrication Center, Pusan National University, Busan 609-735, Korea * Author to whom correspondence should be addressed. E-mail: kkihm@ Received: 1 November 2007 / Accepted: 4 December 2007 / Published: 6 December 2007 Abstract: A new concept using a near-field thermometry sensor is presented, employing a tipless microcantilever experimentally validated for an aqueous medium within approximately one cantilever width from the solid interface. By correlating the thermal Brownian vibrating motion of the microcantilever with the surrounding liquid temperature, the near-field microscale temperature distributions at the probing site are determined at separation distances of z = 5, 10, 20, and 40 µm while the microheater temperature is maintained at 50°C, 70°C, or 90°C. In addition, the near-field correction of the correlation is discussed to account for the quenched cantilever vibration frequencies, which are quenched due to the no-slip solid-wall interference. Highe