reflectively coupled waveguide photodetector for high speed optical interconnection反思耦合波导为高速光电探测器光学互连.pdfVIP

Sensors 2010, 10, 10863-10875; doi:10.3390/s101210863 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Reflectively Coupled Waveguide Photodetector for High Speed Optical Interconnection Shih-Hsiang Hsu * Department of Electronic Engineering/National Taiwan University of Science and Technology, No. 43, Sec. 4, Keelung Rd. Taipei, Taiwan; E-Mail: shsu@.tw; Tel.: +886-227-376-399; Fax: +886-227-376-424 Received: 28 September 2010; in revised form: 28 October 2010 / Accepted: 24 November 2010 / Published: 2 December 2010 Abstract: To fully utilize GaAs high drift mobility, techniques to monolithically integrate In0.53Ga0.47As p-i-n photodetectors with GaAs based optical waveguides using total internal reflection coupling are reviewed. Metal coplanar waveguides, deposited on top of the polyimide layer for the photodetector’s planarization and passivation, were then uniquely connected as a bridge between the photonics and electronics to illustrate the high-speed monitoring function. The photodetectors were efficiently implemented and imposed on the echelle grating circle for wavelength division multiplexing monitoring. In optical filtering performance, the monolithically integrated photodetector channel spacing was 2 nm over the 1,520–1,550 nm wavelength range and the pass band was 1 nm at the −1 dB level. For high-speed applications the full-width half-maximum of the temporal response and 3-dB bandwidth for the reflectively coupled waveguide pho