the electromechanical behavior of a micro-ring driven by traveling electrostatic force的机电行为micro-ring由静电力旅行.pdfVIP

下载本文档

1
0
约4.95万字
约 11页
2017-09-12 发布于上海
举报
版权申诉

the electromechanical behavior of a micro-ring driven by traveling electrostatic force的机电行为micro-ring由静电力旅行.pdf

1、原创力文档（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
7、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

the electromechanical behavior of a micro-ring driven by traveling electrostatic force的机电行为micro-ring由静电力旅行

Sensors 2012, 12, 1170-1180; doi:10.3390/s120201170 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article The Electromechanical Behavior of a Micro-Ring Driven by Traveling Electrostatic Force Xiuqian Ye 1, Yibao Chen 1, Da-Chih Chen 2, Kuo-Yi Huang 3 and Yuh-Chung Hu 2,* 1 School of Electromechanical Automobile Engineering, Yantai University, 32 Qingquan Road, Yantai 264005, China; E-Mails: xiuqian868@ (X.Y.); yibaoch@ (Y.C.) 2 Department of Mechanical and Electromechanical Engineering, National ILan University, 1 Section, Shen-Lung Road, ILan 260, Taiwan; E-Mail: dcchen@.tw 3 Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, 150 Kuo Kuang Road, Taichung 402, Taiwan; E-Mail: kuoyi@.tw * Author to whom correspondence should be addressed; E-Mail: ychu@.tw; Tel.: +886-3-931-7450. Received: 4 January 2012; in revised form: 18 January 2012 / Accepted: 19 January 2012 / Published: 30 January 2012 Abstract: There is no literature mentioning the electromechanical behavior of micro structures driven by traveling electrostatic forces. This article is thus the first to present the dynamics and stabilities of a micro-ring subjected to a traveling electrostatic force. The traveling electrostatic force may be induced by sequentially actuated electrodes which are arranged around the flexible micro-ring. The analysis is based on a linearized distributed model considering the electromechanical coupling effects between electrostatic force and