纳米压痕试验方法地研究.pdf

and hardnesssteeIGCrlwere fusedsilica 5 choosedinthis High—purity high study．Statistic theindentationwiththedeDlhof2000nmwerecarried itssurface researchon outtostudy anddeDlh wasfoundthatthe of of fusedsilica uniformit,／,it degree roughnesshigh-purity canreach toritssmooth surface and surface．Thus，the deplh 0．006pm un¨omlify fusedsilicawere due and MRito帅耐ofhigh—pudty good to瞻amorphousisotropy．To evaluatecoefficientof surface of moduluswas0．56％． variability,theuniformity by Youngs the was thesurface ofnanoindentationwas depthuniformity0．83％．and uniformity 0．73％． the was toF distributionof depthuniformity0．99％．Accordingformula，the Young’s and ofthe canbe modulushardhess consideredtobeuniform．1nternlsof samples high steeI hardhessGCrl hidden surface 5，despitei协only3pm needle村pemartensite，its can about reach structure．Thus．the roughness 0．008pm．mainlyfor皓multi—phasedalloy nanoindentationwilIbeaffected theinfluencetojndentationdeDlhis largely,and relatively toFformula．thesurface modulusofsteelIs small．According Young’s asymmetdcal． As factors beconsideredinthe