封闭式圆形静压平面支承使用定补偿之工作台动态特性-先进工程学刊.PDFVIP

先進工程學刊第五卷 第四期 391 Journal of Advanced Engineering Vol. 5, No. 4, pp. 391-397 / October 2010 封閉式圓形靜壓平面支承使用定補償之工作台動態特性 Dynamic Characteristics of Worktable Mounted by Closed-type Hydrostatic Flat Bearing with Constant Compensations 1 *2 1 1 1 張永鵬 陳鎮憲 李建霖 周先慬 康淵 1 *2 1 1 1 Y. P. Chang , C. H. Chen , J. L. Lee , H. C. Chou , Y. Kang 摘要 本文研究閉式圓形靜壓平面支承之工作台的動態特性，採用毛細管節流器與 定量泵。探討供油壓力、流量和節流參數之影響，工作台施加步階力及簡諧力， 根據分析的結果加以比較設計參數的影響以及工作台之靜、動態反應特性。 關鍵詞 ：封閉式液靜壓軸承，圓形工作台，步階反應，簡諧反應，毛細管，定流 量泵，定量補償 Abstract This study has addressed dynamic characteristics of the circular closed-type worktable mounted on hydrostatic bearing compensated by using capillary restrictors or constant flow pump. For various supply pressures, flow rates and restrictor parameters, the changes of worktable responses of static and dynamic characteristics under the excitation of harmonic force and step force are analyzed respectively. Keywords : closed-type hydrostatic bearing, circular worktable, step response, harmonic response, capillary, constant-flow pump, constant compensation I. 導論 形狀的油腔軸承，比較流速、壓力和剛度等性能。Wang [6] 分析了靜壓滑軌之承載能力及油膜剛度，探討油膜 靜壓軸承使用的定補償，流量正比於供壓及油腔壓 厚度和滑軌的間隙等對工作台性能的影響。 Kang 等人 力之差值，其正比係數為定值，常用的三種型式，包括