应用于汽车的流量传感器研究.docVIP

2012-07-1T9h#e #R#es#ea#r#ch#o#f#F#lo#w#S#e2ns0o1r 2Ba-s0ed7-on1A9p#p#l i#ca#t i#on#2#0of#1A2u-to0m7o-b1ile9######## Y U B o2l i n1 , 2 , 3 , GA N Z h i2y i n1 , 3 3 , L U O X i ao2bi n g 3 , 4 , CA O H ui 1 , 3 , X U J i n g2p i n g 2 1 . I nst i t ute o f M i c ros y ste ms , H u az hon g U ni ve rsi t y o f S cience an d T ech nol o g y , W u han 430074 , Chi na; 2 . De p a rt ment o f El ect roni c S ci ence an d Tec h nol o g y , H u az hon g U ni ve rsi t y o f S cience an d T ec hnol o g y , W u h an Chi na ; 3 . W u han N at i onal L ab o f O p t oelect roni cs , H u az hon g U ni ve rsi t y o f S cience T ec h nol o g y , W u h an 430074 , Chi na ; 4 . S chool o f Ene r g y an d Pow e r En gi nee ri n g , H uaz hon g U ni ve rsi t y o f S cience Tec h nol o g y , W u han 430074 , Chi na Abstract : The t her mal fil m f lo w se n so r ha s bee n re sea rc hed . The me mbra ne i s ma de of multi2fil m wit h hi gh mecha nical ro bu st ne ss a nd lo w cro ss di rectio n t her mal co nductivit y. The t e mp erat ure di st ri butio n of me m2 bra ne ha s bee n si mulat e d ; t he va riatio n of t e mp erat ure o n me mbra ne ha s bee n a nal yzed at diff ere nt f lo w rat e . B y co mp a ri ng t he re sult s of e xp e ri me nt wit h t he re sult s of si mulatio n , a co nfo r mi ng co ncl u sio n i s o b2 t ai ned : at lo w f lo w rat e , t he f alli ng of t e mp erat ure i n up st rea m by cool eff ect i s re ma r ka ble , t he t e mp era2 t ure i n do w n st rea m i ncrea se s sli ght l y , a nd t he t e mp erat ure diff e re nce bet wee n up st rea m a nd do w n st rea m i s no t a ble . Wit h t he f lo w rat e i ncrea si ng , t he t e mp e rat ure i n up st rea m di st a nce reache s sat uratio n , a nd be2 ca u se t here i s a w hole cool eff ect o n t he chip at hi gh f lo w rat e , t he t e mp erat ure i n do w n st rea m di st a nce be2 gi n s to decrea se sli ght l y. Therefo re , t he f lo w