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MAJOR GAS INCIDENTS ·Cylinder Recon [1987] Arsine poisoning during cleaning of cylinder Chapter 9, Gas Incidents Safety Bulletine MAJOR GAS INCIDENTS [cont] ·Germane Explosion, Matheson [1984] Auto decomposition自分解 of Germane ·Gas Cabinet Explosion, IBM [1983] Silane leak without immediate ignition in confined space ·Gas Cabinet Explosion, Hitachi [1990] Silane leak without immediate ignition in confined space MAJOR GAS INCIDENTS [cont] Hydrogen Chloride Tube Trailer, Air Products [1990] Overfill and tube rupture ·Hydrogen/Oxygen Explosion, Atmel [1992] Balance gas error Chapter 9, Gas Incident Safety Bulletine ARSINE POISONING案例, NOV. 14, 1974 # Air Products shipment to United Kingdom # 3 Pure Arsine Cylinders illegally Loaded Below Deck # Valve Torqued Open In Storm And Leaked Thru Dust Cap # Arsine Sucked Into Ventilation System And 8 Crewmen were acutely exposed. Four Suffered severe renal failure But All Recovered Full Kidney Function Six Months Later # Two From Replacement Crew Were Also Exposed # All Recovered With No Permanent Injuries INCIDENT # Location Plasma CVD laboratory on the 5th floor of Department of Basic Technology at Osaka University, Osaka, Japan # Event On the afternoon of Oct. 2, 1991 at 4 PM as a graduate student opened the cylinder valve of a 10 liter silane cylinder it exploded killing him injured. # Aftermath The explosion also sheared a natural gas line and shattered solvent cabinets which ignited, destroying two Laboratories. Major Gas Incidents OSAKA UNIVERSITY INCIDENT OCT.2,1991 BASED ON JUNE,1992 MITI REPORT BACKGROUND # 10 liter cylinder of pure Silane from which only 13 grams was used. Was filled almost 4 years prior. # 4 cylinders for reactor were stored in same Gas Cabin