失效磷酸基化学抛光液的综合利用研究.pdfVIP

失效磷酸基化学抛光液的综合利用 黎铉海 李华生 潘柳萍 （广西大学化学化工学院，广西 南宁 530004 ） 摘要：以失效磷酸基化学抛光液为原料，采用氢氧化钠和氢氟酸为沉淀剂对失效磷酸基化学 抛光液的铝进行沉淀分离，滤渣和滤液经过进一步处理后成为新的有价物质。对回收失效磷 酸基化学抛光液综合利用的主要影响因素、过滤方式以及沉淀进行了讨论。结果表明：氢氧 化钠和氢氟酸的加入量均为化学计量比的1.0～1.2倍，采用二步法过滤的条件下，磷酸的回 收率达到80 ％以上，铝的去除率超过90 ％；经XRD检测，沉淀为锥冰晶石（Na Al F ）。 5 3 14 该方法工艺操作简便，成本低廉，废液处理量大，从而开发出一种从失效磷酸基化学抛光液 中回收利用有价金属铝和抛光液的二次资源综合利用的新技术。 关键词：磷酸基，铝，化学抛光液，综合利用。 Recovery and comprehensive utilization of spent phosphoric acid-based chem.-polishing liquid LI Xuanhai,LI Huasheng,Pan Liuping (College of Chemistry and Chemical Engineering, Guangxi University, Nanning, 530004 Guangxi,China) Abstract: Take spent chem.-polishing liquid containing phosphorus acid as raw material, using NaOH and HF as the precipitating agent separate aluminum from the spent phosphorus acid-based chem.-polishing liquid, the filter residue and the filtrate, after further treatment, become the new valuable material 。Some main facts influencing the recovery of spent phosphoric acid-based chemistry polishing solution, as well as the filtration way and deposit,were investigated 。Results showed that: the addition of NaOH and HF are all stoichiometric ratio of 1.0 to 1.2 times, under the condition of two-step filtration, the recovery efficiency of phosphoric acid is above 80%, and the removal rate of aluminum surpasses 90%; Indicated by XRD examination, the main ingredient of precipitation is chiolite (Na Al F ) 。 This method of operation is simple, low cost and large 5 3 14 disposal capacity, thereby, this study develops a new technology of twice resource comprehensive utilization to reclaim the valuable metal aluminum and the polishing solution from spent chemistry polishing solution con