CH01(part1) 1.0 Basic Wavefront Aberration Theory For Optical Metrology 光学检测教学课件.pptVIP

Field Curvature Where do aberrations come from? Distortion Astigmatism W222 Coma W131 Warren Smith, Modern Optical Engineering, P65 Spherical Aberration ?W=W040?4 + ?W=W040?4 ?W=W020?2 ?W= -1W020?2 +W040?4 Spherical Aberration + Defocus Through-focus Diffraction Image (With Spherical Aberration) Wavefront measurement using an interferometer only provides data at a single field point (often on axis). This causes field curvature to look like focus and distortion to look like tilt. Therefore, a number of field points must be measured to determine the Seidel aberration. When performing the test on