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利用厌氧浮选法分选矽泥之研究
利用厭氧浮選法分選矽泥之研究
The Separation of Silicon Slurry by Anaerobic Flotation Method
1 2
H.C. Li, W.S. Chen
Silicon slurries were wastes from
2 wafer dicin g . Annu ally th e se silicon
slurries were approximately 20,000 tons.
40% 50% They were disposed off at landf ills or
50% 60% in cin er at ed . Th e solid comp on ent s of
DEG PG PEG these slurries were silicon carbide (SiC),
silicon (Si), and a small number of metal
granules; and the liquid components were
alcohols (e.g., diethylene glycol, propylene
glycol, and polyethylene glycol). The SiC
and Si could be recycled. In this study,
we used anaerobic flotation to expedite
the separation and increase the recycling
rate of SiC and Si. Results of our study
were: ( 1) the loss of SiC decreased (with
SiC grade declined by 7%) during ore
flotation ; (2) during ore sedimentation,
the production of SiC increased (with
th e SiC gr ade impr oved by 5%) ; an d
7% (3) the dosage of chemical agent s and
5% flotation time decreased by 16% and 50%,
16% 50% respectively.
關鍵詞: Key words: Si l i c on slu r r
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