Multi-scale modeling of molecular phenomena in plasma …血浆中分子现象的多尺度建模….pptVIP

Multi-scale modeling of molecular phenomena in plasma-assisted thin film deposition Outline Introduction Background Continuum – Rarefied Flow Transition Prediction The Hybrid CFD/DSMC Technique The Coupling Method BC to the DSMC domain on the CFD/DSMC interface Results: The Shock Tube Problem Results Analysis: The Overlap Size Results Analysis: The Coupling Time Step Results Analysis:Number of Repeated Runs for the Ensamble Average Conclusions Remarks Furhter Developments Questions? * Ing. G.Abbate Prof.Dr.Ir. C.R.Kleijn Prof.Dr. B.J.Thijsse Introduction Background CFD Simulation Continuum-Rarefied Transition Prediction The Hybrid CFD/DSMC Technique The Coupling Method BC to DSMC domain on the CFD/DSMC interface Results: The Shock Tube Problem Results Analysis Conclusions Remarks Further Developments The plasma-assisted thin film deposition processes are of great interest in micro-electronics, coating technology and manufacture of LDC A thermal plasma is generated at relatively high pressure (0.1-0.5 bar) The jet expands in a vacuum chamber (10 -100 Pa) Particles mean free path lenght increases Gas flow regime changes from Continuum to rarefied Temperature in the arc: 12000 K Pressure in the arc: 0.2 Bar Vessel pressure: 10 Pa Temperature in the arc: 12000 K Pressure in the arc: 0.2 Bar Vessel pressure: 100 Pa When Kn 0.05 Navier-Stokes equations are no longher valid When Kn 0.05 Time memory expences of DSMC are inadmissible A combined CFD/DSMC Technique is needed: Kn 0.05 = CFD solver Kn 0.05 = DSMC I Stage: Predict II Stage: Solve time: ti time: ti+1 CFD Dtcoupling DSMC CFD Boundary conditions Solution Update Between CFD and DSMC regions an overlapping is considered On both Dirichelet BC coming from the other region are imposed Out of the overlappping region a “buffer cell” is considered where particles are genereted according to hydrodynamic values evaluated by the CFD solver Particles are convected during a DSMC time step Particle