真空镀膜技术及其应用毕业论文设计.doc

真空镀膜技术及其应用 Vacuum coating technology and its application Abstract The apex of scientific research and industrial technology development more and more quickly, Facing todays human huge project:Environment, energy, life and material are closely associated with the development of vacuum technology, The industry is becoming more and more high to the requirement of vacuum technology is put forward, This makes the development and application of vacuum coating technology has been widely, At the same time, the quality requirements of industrialization of coating enhances unceasingly. Polymethyl methacrylate (PMMA), commonly known as organic glass, Its relative molecular mass of about 2 million, Relative density is 1. 19 g/cm3, Is the synthesis of organic transparent materials only a light transmittance can transcend inorganic glass. ts optical plasticity is good, thermoplastic is also very good, In addition also has many excellent performance, Mechanical properties such as its stability, very good workability, mechanical properties of the medium, Basic can meet the general application in performance. his paper mainly studies how to implement in the polymethyl methacrylate substrate surface preparation of high quality metal Al film, Main work around the preparation of high quality, high adhesion of metal Al thin films, and the film thickness and adhesion test, etc. Key words: Vacuum coating, Polymethyl methacrylate, Adhesion, Film thickness detection 目 录 第一章 绪论 1 1.1综述 1 1.1.1 固态薄膜简介 1 1.1.2 真空简介 1 1.1.3 真空镀膜概述 2 1.2真空镀膜技术发展历程及应用范围 2 1.2.1 真空镀膜技术发展历程 3 1.2.2真空镀膜技术应用范围 3 1.3常见的真空镀膜法 3 1.3.1真空蒸发镀膜法 4 1.3.2真空离子镀膜法 5 1.3.3溅射镀膜法 5 1.4真空镀膜技术的发展趋势以及镀膜机的结构部件 6 1.4.1真空镀膜技术的发展趋势 6 1.4.2真空镀膜机的结构部件 6 1.5镀膜基底材料PMMA的概述及性能 6 1.5.1PMMA的概述 6 1.5.2 PMMA的性能 7 1.6课题的提出 8 第二章 实验部分 9 2.1PMMA的制备 9 2.1.1实验试剂的预处理和模具的制备 9 2.1.3实验结果 13