基于pmma波导的乐甫波器件特性分析-characteristics analysis of love wave device based on pmma waveguide.docxVIP

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基于pmma波导的乐甫波器件特性分析-characteristics analysis of love wave device based on pmma waveguide.docx

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基于pmma波导的乐甫波器件特性分析-characteristics analysis of love wave device based on pmma waveguide

AbstractChemicalsensordevelopmentisbeingincreasinglydrivenbytheneedforreal timeanalyses.Nowadays,theuseofsurfaceacousticdevicesaschemicalsensorsis wellknown.However,asacommonacousticmode,Rayleighwavecan’tprovide enoughsensitivitytosatisfyseveralspecialapplications,forexample,detectionof chemicalwaragentsinbattlefieldenvironments.Toresolvetheproblem,thedesign andfabricationofLovewaveresonatordeviceshavebeeninvestigatedinthe dissertation.Thechiefresultsandconclusionsobtainedareasfollows:AccordingtoSAWtheory,theSurfaceskimmingbulkwaves(SSBWs) resonatoranddelaylinedevicesaredesignedandfabricated.Forcomparison,bothof themhavethesamepatternof interdigitaltransducers(IDTs). Comparedwithdelayline, theresonatorhasthelowerinsertionloss(resonator:38.8dB;delayline:47dB)and higherQvalue(resonator:594;delayline:230),whichenhancesthefrequencystability of devices.Thespincoatingtechnologyismodified:thesolutionswithlowconcentration ischosentoobtainthelayerwithasmoothsurface;thestepsareformedontheedges ofsubstratetoraisethethicknessoflayerobtainedduringthespincoatingprocess.In experiments,thePMMAlayerswiththicknessof0.8?3.3μmareobtained.The thicknessoflayersdependsonthespinspeedandtheconcentrationofsolution.The roughnessoflayersdependsonthelastingtimeofthelowspeedandthedifference betweenthelowspeedandhighspeed.Themodifiedspincoatingtechnologyalso shows nice repeatability.TheLovewavedevicesareobtainedbyspincoatingPMMAguidinglayeron thesurfaceofSSBWdevices.Thepropertiesofdevices,suchas,frequency,insertion loss,Qvalueandmasssensitivityarestudiedasafunctionoftheguidinglayer thickness.Andthenthepropertiesofresonatoranddelaylinedevicesarealso compared.Duetotheenhancementoftheelectromechanicalcouplingandtheefficient guidingofacousticenergyintheguidinglayer,insertionlossinitiallydecreaseswithincreasingguidinglayerthicknessandreachestheminimumat1.3μm.Atthegreaterthickness,decreaseincouplingandtheacousticabsorptionofguidinglayerresultsin theincreaseofinsertionloss.ButthevariationofQvaluefollowi