P12异常报错处理(下).docx

3.Message 3.消息 3.1Stage Message 3.1阶段的信息 3.1.1Stage Message 3.1.1Stage消息 M0001STAGE INITIALIZATION NOT EXECUTED M0001STAGE初始化不执行 M0002XY STAGE TRANSFER DESTINATION EXCEEDS SOFTWARE LIMIT M0002XY阶段转移目的地超过软件限制 M0003Z STAGE TRANSFER DESTINATION EXCEEDS SOFTWARE LIMIT M0003Z阶段转移目的地超过软件限制 M0004θ STAGE TRANSFER DESTINATION EXCEEDS SOFTWARE LIMIT M0004θ阶段转移目的地超过软件限制 M0005UNABLE TO FIND SEARCH PATTERN M0005UNABLE找到搜索模式 M0006PROCEED POINT IS NOT CORRECT M0006PROCEED观点是不正确的 M0007ARITHMETIC ERROR M0007ARITHMETIC错误 M0008MARKER NOT CONNECTED M0008MARKER没有连接 M0009BRIDGE WILL INTERFERE WITH TARGET MOVEMENT M0009BRIDGE将干扰目标运动 M0010COMMAND PARAMETERS EXCEED LIMIT M0010COMMAND参数超过限制 M0011NO FILE NAME IS SPECIFIED M0011NO指定文件名 M0012BRIDGE MOVEMENT NOT POSSIBLE BECAUSE OF 3 PIN IS UP M0012BRIDGE运动不可能因为3针 M0013BRIDGE WILL INTERFERE WITH CHUCK TOP M0013BRIDGE将干扰卡盘 M0014BRIDGE WILL INTERFERE WITH TARGET M0014BRIDGE将干扰目标 M0015BRIDGE WILL INTERFERE WITH PROBE POLISHER M0015BRIDGE将干扰探测器抛光机 M0016PROBE POLISHER WILL INTERFERE WITH BRIDGE M0016PROBE抛光机将干扰桥 M0017PROBE POLISHER WILL INTERFERE WITH PROBE CARD M0017PROBE抛光机将干扰探针卡 M0018BRIDGE WILL INTERFERE WITH CHUCK TOP DURING Z MOVEMENT M0018BRIDGE将在Z运动干扰卡盘上 M0019BRIDGE WILL INTERFERE WITH TARGET DURING Z MOVEMENT 在Z运动M0019BRIDGE将干扰目标 M0020POLISHER WILL INTERFERE WITH BRIDGE DURING Z MOVEMENT M0020POLISHER将在Z运动干扰桥 M0021PROBE CARD WILL INTERFERE WITH WAFER DURING Z MOVEMENT M0021PROBE卡将在Z运动干扰晶片 M0022PROBE CARD WILL INTERFERE WITH POLISHER DURING Z MOVEMENT M0022PROBE卡将在Z运动干扰抛光机 M0023CHUCK WILL INTERFERE WITH UPPER ARM DURING Z MOVEMENT M0023CHUCK将在Z运动干扰上臂 M0024CHUCK WILL INTERFERE WITH LOWER ARM DURING Z MOVEMENT M0024CHUCK将在Z运动干扰下臂 M0025SURFACE MAP NOT COMPLETED M0025SURFACE地图没有完成 M0026WAFER MACRO-ALIGNMENT NOT COMPLETED M0026WAFER MACRO-ALIGNMENT没有完成 M0027WAFER MICRO-ALIGNMENT NOT COMPLETED M0027WAFER MICRO-ALIGNMENT没有完成 M0028PAD REGISTRATION OVER LIMIT M0028PAD登记超过限制 M0029INSPECTION PAD REGISTRATION OVER LIMIT M