半导体激光自混合干涉测振仪调制与解调技术的研究-光学工程专业论文.docxVIP

摘要 摘要 I I 摘 要 激光的自混合效应来源于激光器的外部光反馈效应，以前人们总是设法消除 光反馈的影响，后来逐渐由消除光反馈的不利影响到主动利用光反馈效应检测物 理量，从而形成了一门新的技术。 本文研究了半导体激光自混合干涉测振仪的调制与解调技术。基于激光自混 合干涉技术的特点，将频率调制引入自混合干涉中，实现对振动物体的非接触式 测量。分析了半导体激光自混合干涉测振仪的原理, 主要包括自混合干涉测振模 型、自混合干涉信号的解调与振动波形的恢复。设计和制作了自混合干涉测振仪 系统，主要包括光路系统、信号的调制模块和解调模块以及DSP系统的采集处理 模块。其中，信号的调制模块主要包括基于FPGA的DDS信号源的设计、调制电路 的设计以及保护电路设计；解调模块主要包括PD电流电压转换电路设计，放大电 路设计、差分电路设计以及微分电路设计。 半导体激光自混合测振仪体积小、成本低、易于准直、可以非接触式测量， 能够测量振动频率在50 KHz内的物体，其中包括非周期性振动。可以测量出振动 物体的振动频率、振幅以及还原振动波形，振动幅度测量精度可以达到0.325?m， 频率精度为1Hz。 实验表明，研制的半导体激光自混合测振仪能够较好的恢复出振动源的振动 波形以及其他振动参数，能够满足实时性和高精度方面的要求，有可能发展成便 携式激光测振仪，具有小型化和智能化优点，有着广泛的应用前景。 关键词：半导体激光器，自混合，测振仪，调制，解调 Abstract Abstract II II Abstract The self-mixing effect comes from the optical feedback effect . People always tried to eliminate the optical feedback effect previously. Gradually people began to make use of it actively to measure some physical quantities, thus self-mixing interference technology was brought forth. This paper studies the modulation technique and demodulation technique of the self-mixing interference semiconductor laser vibrometer. Based on the characteristics of Laser self-mixing interference technologes, frequency modulation system will be introduced in the self-mixing interference to achieve the objects of the non-contact vibration measurement. The paper introduce the theory of the vibration measure using laser self-mixing interference ， which mainly includes vibration self-mixing interference model, self-mixing interference signal demodulation and recovery of the vibration waveforms. Self-mixing interference vibrometer system is designed ,and it is mainly about the design of optical instrument system , the design of Signal modulation module , the design of demodulator module and the design of signal acquisition and processing module basing on DSP system. The design of Signal modulation module including the design of DDS signal source which is base on FPGA, and the design of modulation circuit and protection circuit. Demod