电晕预电离及其支持的脉冲辉光放电的研究-物理电子学专业论文.docxVIP

华 中 科 技 大 学 硕 士 学 位 论 文 II Abstract Excimer laser has been widely used in medical, industrial, scientific research and other fields. The equipment of preionization has a great influence on its performance. In this dissertation, a set of corona preionization device was designed and studied. Experiments on corona preionization and the supported glow discharge were conducted, and the performances were analyzed. Firstly, several common preionization structures were introduced, whose technical characteristics and application range were analyzed and compared at the same time. Then a set of corona preionization device satisfying the special requirement of excimer laser was determined. Secondly, the basic principal of corona preionization was described in detail and the factors affecting corona discharge were analyzed. Then the scheme of experiment based on the condition of our laboratory was put forward, and corona discharge in the air was observed, their intensity were detected by photodiode and PMT. Thirdly, the emission spectroscopy of corona and arc discharge in the air plasma were measured and compared. The rotational temperature of discharge plasma was calculated. Discharge in laser chamber was also observed and the developing process of discharge plasma were recorded by ICCD camera. Finally, the results of experiment was analyzed and summarized. some suggestions on optimized scheme were proposed. Key words：Excimer laser corona preionization glow discharge emission spectroscopy rotational temperature III 目 录 摘 要 ············································································································ I Abstract ··········································································································II 1 绪 论 1.1 国内外高重复率脉冲准分子激光器的发展动态 ································(1) 1.2 高重复频率准分子激光器中若干关键技术发展概况·························(3) 1.3 课题题目、来源及意义 ·······································································(4) 2