厚膜金属化用玻璃粘结剂的制备及性能研究-材料学专业论文.docxVIP

中文摘要本实验主要目的是设计不同的玻璃配方，在高温熔融条件下制备出具有不同 中文摘要 本实验主要目的是设计不同的玻璃配方，在高温熔融条件下制备出具有不同 热膨胀系数的玻璃粉料，使得应用到金属化过程中玻璃粘结剂能够很好地与金属 导体和基片之间相互热匹配。以球磨湿混、高温熔融、丝网印刷和低温烧成等厚 膜制备工艺为技术特征，采用XRD，SEM等分析手段。研究了玻璃的制备工艺， 分析了玻璃组成对烧成温度、介电性能、润湿性的影响，利用抗热震性检验印刷 ‘卜 层的稳定性。 协 首先，分析了不同烧结温度下玻璃的烧结性能、介电性能、气孔率、吸水率 l 的变化。同时，分析了添加剂对上述性能的影响。碱土金属氧化物和ZnO的加 入虽然有利于降低玻璃的转变温度，促进致密化烧结，但是却增大了玻璃的介电 损耗；A1203的加入抑制玻璃的分相和提高玻璃的析晶温度，并且能够调整玻璃 的热膨胀系数，保持玻璃的稳定性。 其次，探讨玻璃料与A1N基片的润湿情况。确保两者之间附着强度就是玻 璃本身的强度，需要研究所制备体系玻璃的润湿行为。实验发现，含ZnO的玻 璃虽然对基片的浸润性很好，但是在金属化烧结温度下出现了严重分相：含BaO 的玻璃则效果比较好，虽然有少量晶体析出，但是通过渗入到基片晶界可以增强 粘附强度。 最后，研究了玻璃的热性能。玻璃的热膨胀系数取决于玻璃结构的连接性， 热膨胀主要受玻璃中阳离子与非桥氧之间的相互作用。网络外体起断网作用，使 结构变得疏松，增大热膨胀系数；玻璃中含有较多的Zn2+，可以进入玻璃网络中 间起断网作用。在抗热震性实验中发现，玻璃粘结剂与基片的热膨胀系数越接近， 它们之问的连接就越稳定。 ★ ●， 关键词： 介电性能润湿性热膨胀系数抗热震性 ABSTRACTIn ABSTRACT In this paper,the primary aim was to prepare glasses that had different thermal expansion coefficient by hi曲temperature molten method in order tO match conductor and substrate．Wet milling，high temperature molten，screen printing and sintedng were used for sample preparation．The structure of sample was characterized by means of XRD and SEM． ‘’、 Frist，effect of sintering temperature and additive on the dielectric property, 一， sintering property,porosity and water absorption Was discussed．Alkaline-earth oxide ’ and ZnO could reduce glass transition temperature and accelerate sintering，and the influence of them Was analyzed．It Was found that A1203 inhibited phase separation and suppressed crystallization of glasses because it played the role of a network former,and it also could adjust thermal expansion coefficient of the glass． Next,wetting characteristics between glass and substrate had been discussed．It is necessary tO research the wetting behavior of glasses in order to achieve a good film adhesion．It Was found that glasses with ZnO could wet the substrate，but crystallization Was serious．The wettability of glasses with BaO Was excellent，and a bit particle penetrated into grain boundary of the substrate，which increased the