dlc膜的多气源制备及应用电子与通信工程专业论文.docxVIP

AbstractDLC Abstract DLC film(Diamond-Like Carbon，DLC)is all amorphous carbon material with many similar properties as crystalline diamond，and is widely used in mechanical， optical，electrical and biological fields． Plasma chemical vapor deposition(PECVD)method is a common method for the growth of hydrogenated DLC fills，and the substrate is usually placed on the powered electrode of PECVD cavity to grow DLC film，the DLC film grown this way has higher hardness．In this paper,the immersive PECVD method is used to grow DLC films，which immerses the substrate into the plasma and create different electric field and ion density conditions from the powered electrode PECVD method．The DLC film sample thus obtained Can have different structure and properties．In this paper,we used the methane and acetylene as source gases to prepare series of DLC films，and use atomic force microscopy,scanning electron microscopy, nanoindentation，UV—visible spectrophotometer,Raman tester,the contact angle measuring instrument and other equipment to measure and characterize the obtain samples，and analyze the impact of source gas the structure and properties of the DLC films． The result shows that by using acetylene as the source gas to prepare DLC films gets higher hardness and faster deposition rate，while maintaining the advantages of low internal stress at the same time．Using acetylene as the source gas solves the low hardness problem of DLC films prepared with methane as source gas，and makes it possible to use DLC films as protective optical coatings． In this study,the DLC fill is grown on the optical resin lens by immersive PECVD method and acetylene source gas，and the surface mechanical properties and spectral modification applications are tested．The application of DLC film in the protective optical coating is explored．In addition，the hydrophobic properties of DLC fills grown by immersive PECVD method and the powered electrode PECVD method are compared，and the results shows that the DLC film p