飞秒激光与金属材料相互作用研究物理电子学专业论文.docxVIP

摘要本论文主要对飞秒激光与金属材料相互作用进行了理论和实验方面的研究， 摘要 本论文主要对飞秒激光与金属材料相互作用进行了理论和实验方面的研究， 主要内容如下： 一．使用约化后的二维双温模型对飞秒激光烧蚀金属材料进行了数值模拟， 模拟了飞秒激光烧蚀过程中，电子和晶格的耦合过程，得出电子晶格耦合时间在 皮秒量级；根据飞秒激光烧蚀的特点，提出了一种飞秒激光烧蚀热影响区的定义， 并根据定义计算了飞秒激光烧蚀金属材料的径向熟影响区，得出飞秒激光烧蚀热 影响区在lm量级；另外还计算了热影响区晶格的冷却速率；以及单脉冲的烧蚀 速率和多脉冲进行烧蚀时的累积效应，并分析了材料参数对它们的影响。 二．飞秒激光金属微加工的实验研究 1．金属薄板表面多脉冲烧蚀的实验研究。用不同能量，相同脉冲次数以及相 同能量，不同的脉冲次数分别进行了烧蚀实验，得出在相同的脉冲能量条件下， 随着脉冲次数的增多，烧蚀半径逐渐的增大，烧蚀阈值逐渐的减小；并利用实验 结果计算了多脉冲烧蚀闽值、单脉冲烧蚀阈值和累积因子。 2．金属薄板打孔的实验研究。通过改变物镜的数值孔径、激光功率、扫描速 度探索最佳的加工工艺，得出螺旋加工是一种比较好的加工方法，基本可以保证 孔在入口和出口是圆形；并分析了空气传输对最终加工结果的影响。 关键词： 飞秒激光双温模型热影响区微加工 ABSTRACTIIl ABSTRACT IIl this thesis，theoretical and experimental studies on Interaction of femtosecond laser pulses with metal materials are presented．The main contents are classified as follows： 1．The ablation processing of metal materials with femtosecond laser pulses were simulated by the 2D Two-Temperature Model(TTM)，the electronic and lattice coupling time which Was calculated is picosecond magnitude；According to the characteristic of femtosecond laser ablation，a definition on heat affected zone of femtosecond laser ablation Was proposed,and on the basis of the definition，heat affected zone of femtosecond laser ablation Was calculated，il is nanometer magnitude； besides，the cooling rate of lattice，the ablation rate of single pulse and accumulation behavior of multiple pulses were calculated．Besides，the effects of material parameters on them were studied． 2．The experiments on femtosecond laser micromachining of metal plate were studied． (a)．The multiple pulses ablation on the surface of A1 alloy plate：The experiments perform in different energy and different pulse numbers．In the same laser power,the more pulses there are，the bigger the ablation radius is and the smaller the threshold is． The multiple pluses threshold、single pulse threshold and incubation coefficient are calculated from the experiment results． (b)．The metal drilling：In order to get optimal technology of metal drilling， different N．A．of o