低温烧结batio3基x8r陶瓷研究微电子学与固体电子学专业论文.docxVIP

摘要BaTi03陶瓷是AB03型化合物，具有典型的钙钛矿型结构，是最重要的铁电 摘要 BaTi03陶瓷是AB03型化合物，具有典型的钙钛矿型结构，是最重要的铁电 材料之一。由于BaTi03陶瓷具有优异的介电性能和良好的温度稳定性，以它为 基的X7R、X8R多层陶瓷电容器已广泛应用于移动通讯、汽车电子系统中。本 论文以BaTi03陶瓷为基础，重点研究了添加剂在低温烧结过程中的作用，以及 对烧结特性、介电性能的影响。 在系统中掺入添加剂Li2C03和BaF2，烧结过程中能够与BaTi03反应生成低 温活性液相，有效地降低陶瓷的烧结温度和烧结时间，实现BaTi03陶瓷的低温 快速烧结。低价的Li+取代BaTi03晶格中Ti4+的位置，产生了晶格空位，也能够 促进烧结的固相传质过程，从而缩短烧结时间。 低温烧结的BaTi03基陶瓷，能够抑制晶粒的异常长大，形成细晶效应，提 高了陶瓷的介电性能。适量BaF2的引入，改变了BaTi03的化学计量Bafri比， 形成富Ba相Ba2Ti04，极大地改善了BaTi03基陶瓷的低温烧结性能。 选择合适的添加剂含量，并综合考虑陶瓷的性能指标，制备出了低温烧结的 BaTi03基X8R陶瓷，性能参数如下： 烧结温度：850℃ 介电常数：￡2000 损耗因子：tg 6 S1．5％ TC特性：h e／￡冬±15％(-55C～155℃) 绝缘电阻率：pv-2_l×1011 Q·cnl 关键词： BaTi03；低温烧结；介电性能；X8R ABSTRACTAs ABSTRACT As one of the most important ferroelectric materials，BaTi03 ceramics is the AB03 compound with a typical perovskite structure．Due to its excellent dielectric performances and hilgh temperature—stability,BaTi03-based X7R and X8R MLCC have been extensively used in the fields of mobile communication and electronic system of automobile．This paper focuses on the study of effects of additives on the process of low temperature s缸ering，sintering characteristics，and dielectric performances based on BaTi03 ceramics． Li2C03 and BaF2 are doped into Barn03 system as additives，reacting witll BaTi03 during the process of sintering．Low temperature reactive liquid-phase is generated in this process，and has the abilities to lower sintering temperature and reduce sintering time effectively．Then BaTi03 ceramics is fast-sintered at low temperature．Lattice vacancies ar e generated when Li+substitutes the Ti针site of BaTi03．Because of its e妇略ct on accelerating the mass-tranport process，the presence of vacancies in BaTi03 lattice is able to decrease sintering time． The process of sintering at low temperature inhibits the abnormal grain growth of BaTi03 ceramics，and leads to the micros仇lct眦e of fined-grain．This helps improve dielectric performances of ceramics．111e sintering characteristics at low temperature is improved significantly by the addi