多元镍磷铝铜合金薄膜相变化与表面特性研究Phase-YOKEnet.PDF

多元鎳磷鋁銅合金薄膜相變化與表面特性研究 Phase transformation and surface characterization of multicomponent Ni-P-Al-Cu alloy coating * 吳芳賓 * Fan-Bean Wu 電話 :037-381004, e-mail:fbwu@nuu.edu.tw 摘要 achieved by sputtering control on the 本實驗利用電鍍鎳磷厚膜於銅基材上使 composite target, which was made by an 成為一複合靶材，提供濺鍍製程中鎳、磷與銅 electroplated Ni-P thick film on Cu disc. 之來源，並配合雙靶濺鍍技術成功地鍍製出多 The Cu content decreased with the 元鎳磷鋁銅(Ni-P-Al-Cu)合金薄膜。初鍍之合 increase of Ni and P elements from 金薄膜具非晶質結構，經由臨場(In-situ)熱處 coating surface. The gradient 理相變化 X-ray 繞射分析，可得知該合金薄膜 distribution of Ni, P, and Cu elements 於 400°C 開始產生過渡介金屬化合物析出及 was revealed, showing a successful 鎳結晶之效果，溫度達 525°C 以上則生成相變 NiP/Cu target design and a useful 化之最終相如 Ni 、Al-Cu 、Cu-Ni 、Al-P 及 Ni-P sputtering strategy. Through insutu 等。本研究亦利用臨場電化學原子力表面分析 X-ray phase identification, the coating (in-situ ECAFM)技術探討鎳磷鋁銅合金薄膜 showed an amorphous/nanocrystalline 在腐蝕環境下之表面型態變化過程及其機 feature in the as deposited state. A 制。含鋁銅之鎳磷基合金膜在腐蝕環境下除了 good thermal stability was revealed for 一般之侵蝕現象外，亦會伴隨正方氧化銅之生 the gradient Ni-P-Al-Cu coating since 成，對於薄膜表面型態變化及腐蝕特性有顯著 no significant phase transformation 影響。 phenomenon was observed under