基于相移干涉法的三维表面微观轮廓测量技术的研究-信号与信息处理专业论文.docxVIP

哈尔演理 哈尔演理 T大学丁〔学硕士学仪论文 -1- -1- 基于相移干涉法的 王维表面微观轮廓测量技术的研究 摘要 相移干涉术 (PsI)作为…种光电型干涉测试技术，具有结构简单、调 制方便、实时快速、商精度以及全场自动测量麦等优点，并且已经广泛应用于 光学零件、光学系统、精密表面的检测以及其它与光程差参数相关的物理量 的测量〈如温度场、密度场等)。 本论文对三维微观表面轮廓相移干涉测试技术展开了较为全面的理论与 实验研究工作。针对相移干涉水的核心问题一一相位提取技术进行深入研 究，分析了栩移误类及 CCD :ll量化非线性误差对各种相位提取算法造成的误 楚，选取了适合本课题的相位提取算法，提高了系统测最精度。针对相移干 涉法中对相移装置号要求比较苛刻，必须获得精确的相移步长这…特点，本课 题采用? 电陶资作为相移器件，选定了其线性特性较好的区域，并根据这一 区域设计出了相应的驱动电源，完成了精密移栩系统的设计，减小了相移误 楚。在本论文中，还系统详细地分析了干涉图像的各种处理方法，并提出了 改进算法，运用 Matlab 软件做了大量实验，实验结巢表明上述第法能有效 地改善于涉阁像的质量，从而提高干涉测蠢的精度。 最后，对实验室尿布的干涉仪进行改进设计，采用激光为干涉光源， CCD 为图像传感器，压电陶资提供微小位移，通过阁像采集卡将干涉条纹 采集到计算机内存.采用上述系统得到了标准样块的王维微观表面轮廓阁， 并提出下一步研究工作的设想。 关键诩 相移干涉: 王维轮廓;相位提取术;干涉图像 哈尔滨现 哈尔滨现t大学工学硕士学位论文 -11- -11- Research on 丁he Measurement of 3-D Surface Topography Based on PhaseStepping Interferometer Abstract Phase-shiftíng interferome位y has been considered as a type of opto- electrical measuring interferometry and ít has many advantages ，suchωsimple structure，easíly modulated ，fast and real time，high accuracy and whole field automatic measurement. lt has been widely used to test optical element，optical system，and to detect optical surface as well as some physical parameter (such as temperature field，density field) related with optical path difference. In this thesis，the author comprehensively described the research results on the theory and algorithms of phase-shiftíng interferometry. The study is concentrated on the key problem of phase-shifting interferometry: phase- extracting algorithms. By analyzing different phase-stepping algorithms ，the phase e町or due to inaccurate phase-shift between data frames and image-detector nonlinearity were modeled and calculated ，the best method was choosed. Accordingly ，the system performance was improved. Because the method of phase-shi价ing has excessive demand and has to accept accurate steps，we adopted PZT as driving apparatus and choosed the area that its characteristic of linearity is be忧er. Based on this area，we designed power s