基于数学形态学的AFM探针盲建模方法研究-仪器科学与技术专业论文.docxVIP

influences the conical probe are carried out. The simulation results show that, to reconstruct the probe accurately, the cone angle of the tip characterizer must be smaller than that of the tip. When it meets the above conditions, the BTR error is insensitive to the cone angle of the tip characterizer but increases linearly with the radius of curvature of tip characterizer. In particular, for sharp (20 nm radius) and blunt (80 nm radius) tips, the radius of curvature of the tip characterizer must be smaller than 5 nm. Secondly, a model to predict the associated BTR errors is established. The errors derived from the model are indeed in quantitative agreement with the simulation results. 5. Some actual experiments for the calibration of the conical probe shape are done by using “Tipcheck” as a tip characterizer. Within the allowable error range, the results are in good agreement with the tip shape extracted from the SEM image. Key words：AFM, 3D tip shape, Tip characterizer, BTR errors, Error model 目 录 HYPERLINK \l _bookmark0 第一章 绪论1 HYPERLINK \l _bookmark1 1.1 探针形貌提取的必要性1 HYPERLINK \l _bookmark2 1.1.1 探针形貌对扫描图像的影响1 HYPERLINK \l _bookmark3 1.1.2 探针形貌对表征材料机械力学特性的作用2 HYPERLINK \l _bookmark4 1.2 探针形貌提取的方法概述3 HYPERLINK \l _bookmark5 1.2.1 电镜成像法3 HYPERLINK \l _bookmark6 1.2.2 特殊探针标样辅助提取法4 HYPERLINK \l _bookmark7 1.2.3 基于数学运算的提取方法8 HYPERLINK \l _bookmark8 1.3 本文主要工作10 HYPERLINK \l _bookmark9 第二章 探针盲建模算法理论分析及程序设计11 HYPERLINK \l _bookmark10 2.1 理论分析11 HYPERLINK \l _bookmark11 2.1.1 形态学基本定义及性质11 HYPERLINK \l _bookmark12 2.1.2 膨胀运算12 HYPERLINK \l _bookmark13 2.1.3 盲建模算法14 HYPERLINK \l _bookmark14 2.1.4 腐蚀运算18 HYPERLINK \l _bookmark15 2.2 程序设计18 HYPERLINK \l _bookmark16 2.2.1 程序流程18 HYPERLINK \l _bookmark17 2.2.2 初始探针形貌及降噪阈值设置22 HYPERLINK \l _bookmark18 2.3 合适标样的重要性24 HYPERLINK \l _bookmark19 2.4 本章小结25 HYPERLINK \l _bookmark20 第三章 探针标样适宜形状的探究26 HYPERLINK \l _bookmark21 3.1 仿真过程26 HYPERLINK \l _bookmark22 3.1.1 基于实际探针形貌的理论模型提取26 HYPERLI