海水环境高性能类石墨碳薄膜摩擦学研究-凝聚态物理专业论文.docxVIP

摘 摘 要 摘 要 机械密封在液压传动、泵、阀、反应釜等设备中普遍使用。然而现有的摩擦 副材料无法满足其在苛刻环境下（海水环境）的密封要求，开发新材料、新技术 势在必行。本论文以非平衡磁控溅射技术在不锈钢和单晶硅表面制备的高性能 Cr/GLC 碳基薄膜为研究对象，并进一步研究了该类石墨碳基薄膜与典型的金属配 副(316L、440C、Al、Ti、H62、GCr15)和陶瓷配副(Si3N4、SiC、WC、Al2O3、ZrO2) 在模拟海水环境下的摩擦学行为；另外，利用等离子刻蚀技术与磁控溅射技术结 合的方法在单晶硅表面构筑织构化 Cr/GLC 碳基薄膜，并研究在大气、水和模拟海 水环境下的摩擦学行为。为 Cr/GLC 薄膜在海水环境下配副选型和摩擦学性能的提 高提供实验依据和理论指导。 系统研究了 Cr/GLC 薄膜与金属配副(316L、440C、Al、Ti、H62、GCr15)和 陶瓷配副(Si3N4、SiC、WC、Al2O3、ZrO2)在模拟海水环境中的摩擦学性能，结果 表明：同等条件下，GLC 薄膜与金属配副的摩擦系数均介于 0.083-0.179 之间。 GLC-Ti 和 GLC-H62 的磨损机制为局部断裂；另外，GLC-Al 配副磨损机制为黏着 磨损。GLC 薄膜与陶瓷配副的摩擦系数在 0.06-0.11 之间。从 GLC 薄膜磨损形貌 观察 GLC 薄膜既无黏着磨损和也无局部断裂磨损。与金属配副相比，GLC 薄膜与 陶瓷配副对磨时，GLC 薄膜表现更优异的摩擦学性能。 利用等离子刻蚀技术在单晶硅表面刻蚀不同尺寸的微坑(5.5 ?m，1.5 ?m， 600 nm， none )，将其作为基底，利用非平衡磁控溅射技术制备 Cr/GLC 碳基薄膜， 研究在大气、水和模拟海水环境下的摩擦学性能。在这三种环境下，织构化 Cr/GLC 薄膜的摩擦系数由微坑尺寸的从大到小呈现先减小后增大的规律，尺寸为 1.5 ?m 织构化 Cr/GLC 薄膜表现低摩擦的性能；在液体润滑（水和模拟海水）状态下，织 构化 Cr/GLC 薄膜的磨损由尺寸的从大到小呈现先减小后增大的趋势，尺寸为 600 nm 织构化 Cr/GLC 薄膜表现低磨损。 关键词 类石墨碳薄膜；织构化类石墨碳薄膜；摩擦学行为；模拟海水环境 A Abstract Abstract Mechanical seals are widely used in hydraulic drive, pump value and agitated reactors. However, the frictional materials are hardly to satisfy the tough and harsh seal environments such as seawater. It is necessary to exploit new materials and technologies to meet the requirments. In this paper, high performance of Cr/GLC carbon based film on the surface of stainless steel and single sillicon was prepared by magnetron sputtering. The tribological behaviors of the Cr/GLC films sliding against metallic counterparts such as 316L、440C、Al、Ti、H62、GCr15) and ceramic counterparts such as Si3N4、SiC、WC、Al2O3、ZrO2 in artificial seawater environment were studied. In addition, textured Cr/GLC films were prepared on sillicon substrate by the combination of plasma etching technology and magnetron sputtering technology. Tribological performances of textured Cr/GLC in dry, water and artificial seawater were studied. To provide experimental evidence and theoretical guidance for choosing counterparts and improving tribolo